title: Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements
metadata.name: dc.contributor.author
metadata.value: Morozov, Nikita F.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Indeitsev, Dmitriy A.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Igumnova, Vasilisa S.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Lukin, Alexei V.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Popov, Ivan A.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Shtukin, Lev V.
metadata.lang: -
metadata.name: dc.date.accessioned
metadata.value: 2021-07-16T14:27:09Z
metadata.lang: -
metadata.name: dc.date.available
metadata.value: 2021-07-16T14:27:09Z
metadata.lang: -
metadata.name: dc.date.issued
metadata.value: 2021-06
metadata.lang: -
metadata.name: dc.identifier.citation
metadata.value: Morozov N. I., Indeitsev D.A., Igumnova V. S., Lukin A.V., Popov I.A., Shtukin L.V. Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements. Vestnik of Saint Petersburg University. Mathematics. Mechanics. Astronomy, 2021, vol. 8 (66), issue 2, pp. 233–246.
metadata.lang: en_GB
metadata.name: dc.identifier.other
metadata.value: https://doi.org/10.21638/spbu01.2021.204
metadata.lang: -
metadata.name: dc.identifier.uri
metadata.value: http://hdl.handle.net/11701/29878
metadata.lang: -
metadata.name: dc.description.abstract
metadata.value: In the presented work, a model of a microelectromechanical accelerometer with two movable
  beam elements located between two fixed electrodes is proposed. The action of the transfer
  forces of inertia in the longitudinal direction leads to a change in the spectral properties of
  the system, which is a useful output signal of the sensor. The dynamics of the system in the
  presence of a weak electrostatic coupling between the sensitive elements is characterized by
  the phenomenon of modal localization   a significant change in the amplitude ratios for the
  forms of inphase and antiphase oscillations with small changes in the measured component
  of the acceleration vector of the moving object. Diagrams of equilibrium positions are
  plotted for varying the potential difference between a fixed electrode and a movable element
  and between two movable elements. The dependences of the frequencies and the ratio of
  the components of the eigenvectors on the magnitude of the inertial action are investigated.
  It is shown that the sensitivity of a sensor based on modal localization can be orders of
  magnitude higher than the sensitivity of known systems based on measuring the shift of
  natural frequencies. A nonlinear dynamic model of an accelerometer with external harmonic
  electrostatic excitation of oscillations is constructed. Resonance characteristics are obtained,
  a comparison is made between the model describing the modal characteristics of the system
  and the model describing the real dynamic mode of operation taking into account nonlinear
  factors.
metadata.lang: en_GB
metadata.name: dc.description.sponsorship
metadata.value: This work is supported by St. Petersburg University (project no. 51092930) and Russian Foundation
  for Basic Research (project no. 18-01-00884-A).
metadata.lang: en_GB
metadata.name: dc.language.iso
metadata.value: ru
metadata.lang: en_GB
metadata.name: dc.publisher
metadata.value: St Petersburg State University
metadata.lang: en_GB
metadata.name: dc.relation.ispartofseries
metadata.value: Vestnik of St Petersburg University. Mathematics. Mechanics. Astronomy;Volume 8 (66); Issue 2
metadata.lang: -
metadata.name: dc.subject
metadata.value: resonant accelerometer
metadata.lang: en_GB
metadata.name: dc.subject
metadata.value: weakly coupled system
metadata.lang: en_GB
metadata.name: dc.subject
metadata.value: modal localization
metadata.lang: en_GB
metadata.name: dc.subject
metadata.value: resonance curves
metadata.lang: en_GB
metadata.name: dc.title
metadata.value: Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements
metadata.lang: en_GB
metadata.name: dc.type
metadata.value: Article
metadata.lang: en_GB
resources.filename: 233-246.pdf
resources.url: https://dspace.spbu.ru/bitstream/11701/29878/1/233-246.pdf
resources.format: Adobe PDF
resources.size: 3,12 MB