title: Successive ionic layer deposition: possibilities for gas sensor applications
metadata.name: dc.contributor.author
metadata.value: Korotcenkov, G.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Tolstoy, V.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Schwank, J.
metadata.lang: -
metadata.name: dc.contributor.author
metadata.value: Boris, I.
metadata.lang: -
metadata.name: dc.date.accessioned
metadata.value: 2016-05-21T18:11:27Z
metadata.lang: -
metadata.name: dc.date.available
metadata.value: 2016-05-21T18:11:27Z
metadata.lang: -
metadata.name: dc.date.issued
metadata.value: 2005
metadata.lang: -
metadata.name: dc.identifier.uri
metadata.value: http://hdl.handle.net/11701/2278
metadata.lang: -
metadata.name: dc.description
metadata.value: review paper
metadata.lang: en_GB
metadata.name: dc.description.abstract
metadata.value: In this paper we discuss results of research related to design of successive ionic
  layer deposition (SILD) technology for both preparing porous nano-structured SnO2 films, and surface modification of SnO2 films deposited by spray pyrolysis. This new method of metal oxide deposition has exited high interest, because of this method simplicity, cheapness, and ability to deposit thin nano-structured films on rough surfaces. Method of successive ionic layer deposition (SILD) consists essentially of repeated successive treatments of the conductive or dielectric substrates by solutions of various salts, which form on the substrate surface poorly soluble compounds. It was shown that SILD technology is effective method for above mentioned purposes.
metadata.lang: en_GB
metadata.name: dc.language.iso
metadata.value: en
metadata.lang: en_GB
metadata.name: dc.publisher
metadata.value: IOP Publishing Ltd
metadata.lang: en_GB
metadata.name: dc.subject
metadata.value: sensors SILD
metadata.lang: en_GB
metadata.name: dc.title
metadata.value: Successive ionic layer deposition: possibilities for gas sensor applications
metadata.lang: en_GB
metadata.name: dc.type
metadata.value: Article
metadata.lang: en_GB
resources.filename: TolstoyVP and all-SILD-review.pdf
resources.url: https://dspace.spbu.ru/bitstream/11701/2278/1/TolstoyVP%20and%20all-SILD-review.pdf
resources.format: Adobe PDF
resources.size: 334,74 kB